Growth Mechanism of Ru Films Prepared by Chemical Vapor Deposition Using Bis(ethylcyclopentadienyl)ruthenium Precursor , Matsui, Yuichi, Hiratani, Masahiko, Nabatame, Toshihide, Shimamoto, Yasuhiro, Kimura, Shinichiro
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Matsui et al. (2001) studied this question.
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