Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film

This is the authors' abstract. We don't add key points for this paper.

We investigate ion beam etching that uses a planarizing film for smoothing copper surfaces with nm-order roughness. Copper surfaces were cut using a turning machine with a single-crystal diamond tool to prepare mirror surfaces as workpieces. Then, the surfaces were coated with photoresist, and etched using ion beams with an appropriate incidence angle. As a result, tool marks exhibited on the turned surfaces were removed, and the surfaces with a smoothness of nm order were further improved by the ion beam process.