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A 2-bit Ka-band RF MEMS frequency tunable slot antenna is disclosed. It is demonstrated on a fused silica wafer using a micro-fabrication process requiring six masks. The return loss and gain for each of the four states are measured using a probe station based setup for on-wafer antenna measurements. The antenna has a measured tunable bandwidth of 6.8 GHz. The average measured gain is 1.74 dBi, and the average measured cross-polarization is -9.22 dBi. The extracted switching time is 5.19 mus for a drive voltage of 45 V.
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Caekenberghe et al. (2008) studied this question.
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