Plasma polymerization of tetrafluoroethylene

The plasma polymerization of C2F4 was carried out in both continuous wave and pulsed rf discharges to establish the effects of reaction conditions on the kinetics of polymer deposition and the polymer structure. ESCA spectra of the polymer show evidence for CF3, CF2, and CH2 groups. Under conditions favoring low deposition rates, the dominant functional group is CF2. At higher deposition rates the concentration of CF2 groups is reduced and a more crosslinked polymer is produced. Both polymer deposition rates and polymer structures were essentially identical when using continuous wave and pulsed rf discharges.