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January 5, 2009Applied Physics LettersOpen Access

Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

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Authors

DSDaniel ShirCalifornia NanoSystems InstituteENErik C. NelsonUniversity of Illinois Urbana-ChampaignYCYu ChenUniversity of Illinois Urbana-Champaign

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Shir et al. (2009) studied this question.

synapsesocial.com/papers/6a9ee0e3a7e2dafd7c61ecb3https://doi.org/10.1063/1.3036955
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