On-wafer dielectric measurements of Ba0.5Sr0.5TiO3 thin films have been established over broad frequency ranges (40 Hz–50 GHz), using metallic coplanar transmission lines patterned onto the films. The films show tuneability of 27% and 18% at 1.6 kV cm−1 for low and microwave frequencies, respectively.
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Suherman et al. (2004) studied this question.
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