CVD routes to titanium disulfide films

Tis2 films, used in lithium batteries, can be prepared by a variety of methods, including several chemical vapor deposition (CVD) routs. The available CVD routes are briefly reviewed, together with the techniques used to check that the resulting films meet the stringent requirements of the lithium battery industry, for example. Solid‐state lithium batteries used in heart pacemakers require TiS2 thinfilms of high purity, denese packing, exact stoichiometry, and a preferred crystallographic orientation, all of which can be achived by CVD methods.