Answers are grounded in this paper and cite their sources.
In order to make the corners of V-shaped grooves rounded and improve the breakdown voltage of gate oxide there, a method of growing an oxide film on the V-shaped surface and etching it off before the gate oxide growth is proposed. Experiments and theory show its effectiveness.
No takes yet. Share an insight, caveat, or question.
Sekigawa et al. (1985) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: