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May 1, 1989Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Reactive magnetron sputtered zirconium oxide and zirconium silicon oxide thin films

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Authors

MRMichael A. RussakNational Renewable Energy LaboratoryCJC. JahnesIBM (United States)EKEric P. Katz

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Russak et al. (1989) studied this question.

synapsesocial.com/papers/6aa6a0036a6f69d61978fc8dhttps://doi.org/10.1116/1.576263
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