We report a scanning tunneling microscope (STM) with 500 μm×500 μm field of view. It departs from past designs in that a long-range X-Y stage carries the specimen and scans while the STM head is held stationary. The STM head is capable of scanning with a range of 8 μm. Combining the capability of tip scanning and X-Y stage scanning yields a wide dynamic range and has useful applications for measuring optical surfaces.
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Fu et al. (1992) studied this question.
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