Optimization of TiO2/Cu/TiO2 Multilayer as Transparent Composite Electrode (TCE) Deposited on Flexible Substrate at Room Temperature

Highly transparent conductive composite electrodes made of multilayer of TiO 2 and Cu (TiO 2 /Cu/ TiO 2 ) thin films (30/3–9/30 nm thick) are deposited onto flexible substrates at room temperature. The micro-structural, optical and electrical properties of the multilayer are studied with the use of atomic force microscopy, uv-visible spectrophotometry and Hall measurement tool. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the multilayer films. The highest FOM achieved is 6.4 × 10 −3 Ω −1 for a Cu thickness of 6 nm with a sheet resistance of 19 Ω/sq and an average transmittance of 81%.