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January 1, 2004Electrochemical and Solid-State LettersOpen Access

Subnanometer Scaling of HfOsub 2/Metal Electrode Gate Stacks

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Authors

JPJeff J. PetersonIntel (United Kingdom)CYChadwin D. YoungThe University of Texas at DallasJBJoel BarnettUniversity of California, Los Angeles

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Peterson et al. (2004) studied this question.

synapsesocial.com/papers/6aaa3b6861028f759ad7d5cchttps://doi.org/10.1149/1.1760712
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