Optical Properties of MoSi2/Si Multilayer Laue Lens as Nanometer X-ray Focusing Device

In this study, we designed and fabricated a multilayer Laue lens (MLL) as a hard X-ray focusing device. MoSi 2 and Si were chosen to form the layers by DC magnetron sputtering owing to their superior properties. The optical properties of the MLL were measured at BL24XU of SPring-8 for 20-keV X-rays. In order to confirm the effect of dynamical diffraction, far-field diffraction images were captured at various incidence angles and depths. The resultant intensity distributions showed a similar structure to those derived through calculations. An almost diffraction-limited size of 28.2 nm was obtained. The maximum local diffraction efficiency was 64.7%.