A single-step lift-off process using chlorobenzene soak on AZ4110 resist is described. The effects of the soak time and temperature on the thickness of the overhang is presented. This process provides thick overhang with vertical side walls, which are essential for the successful lift-off. Finally, the effect of deep UV exposure on the lift-off is discussed.
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A. Fathimulla (1985) studied this question.