Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
October 1, 1983Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

High resolution patterning of silicon by selective gallium doping

View Full Paper
Ask AI
Bookmark
Share

Authors

IBIvan L. BerryLam Research (United States)ACA.L. CavigliaUnited States Department of Defense

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

Berry et al. (1983) studied this question.

synapsesocial.com/papers/6aae0d79429115f4e7e0d4c5https://doi.org/10.1116/1.582676
View Full Paper
Ask AI
Bookmark
Share