A High-Selectivity 11.9-GHz Filter Realized in a Periodically Poled Piezoelectric AlScN Film

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This letter presents a highly selective bulk acoustic wave (BAW) filter operating at 11.9 GHz, fabricated with periodically poled piezoelectric film (P3F) aluminum scandium nitride (AlScN) technology. The metric used in determining selectivity is the 20-dB shape factor, defined as the ratio of the 20-dB to 3-dB filter bandwidth (BW). With a 20-dB shape factor of 1.71 and a minimum insertion loss (IL) of 1.5 dB, this filter is suitable for RF filtering applications that require efficient spectrum utilization or mitigation of near band interference.