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An electron-probe X-ray microanalyzers, the characteristic X-ray radiation is generated within a small volume of sample and the emitting surface area is on the order of 1 μm 2 . For a distance to analyzer of approximately 0.5 m, this small emitting area can be considered as a point source. Practical implementations of the electron-probe X-ray microanalysis (EPMA) require a high spectral resolution and sufficient intensity.
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Mazuritsky et al. (2001) studied this question.
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