94-GHz Log-Periodic Antenna on GaAs Substrate Using Air-Bridge Structure

We fabricated a compact, 94-GHz log-periodic planar antenna on GaAs substrate. We used millimeter-wave monolithic integrated circuit (MMIC) process technology to fabricate the on-chip antenna. An air-bridge crossover is used to replace the conventional bonded structure for crisscross connection, which is compatible with active devices and circuits. The fabricated antenna chip size is 1.2 times 2.6 mm2. Measurement results show that this antenna can operate from 87 to 99.5 GHz with its return loss better than -10 dB. At 94 GHz, the log-periodic antenna has a return loss of -11 dB and 4.8 dBi of gain.