Ferroelectric, piezoelectric thin film material and processes are gaining more and more importance for innovative devices that are focusing on miniaturization, high performance and integration. A piezoelectric thin film MEMs platform has been developed that enables miniaturized ultrasound transducers that operate in the frequency range of >50 kHz up to >10 MHz. The thin film ultrasound transducers show a high quality and reliability. With this technology platform ultrasound transducers have been developed that operate at 60–90 kHz and show a coverage >25 m2 at a low operating voltage of 12 V. The same technology platform has been used to realize ultrasound transducer arrays operating at 3–10 MHz. Ultrasound images have been demonstrated with these piezoelectric thin film transducer arrays.
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Klee et al. (2012) studied this question.
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