Small-size silicon-oxynitride AWG demultiplexer operating around 725 nm

We present experimental results of very compact, high /spl Delta/n, five-channel arrayed waveguide gratings (AWGs) with 5 nm-channel-spacing fabricated in the silicon-oxynitride material system. The on-chip insertion loss is about 5 dB and the crosstalk is -30 dB around 725 nm wavelength. The uniformity of the waveguide layers is better than /spl plusmn/1%,.