Enhancing the Reliability and Durability of Micro-Sensors Using the Taguchi Method

This study presents the development and optimization of a flexible integrated three-in-one micro-sensor using Micro-Electro-Mechanical Systems (MEMS) technology. To enhance its reliability and performance, the Taguchi Method was employed to analyze and optimize key fabrication parameters, including the electrode area, electrode thickness, and protective layer thickness. An L4 orthogonal array design enabled efficient experimentation with minimal runs. Experimental results demonstrate that optimized parameter combinations significantly improve sensor linearity, sensitivity, and reproducibility. Comparative analysis with commercial sensors shows the superior reliability of the self-fabricated sensor, particularly in airflow velocity detection. The findings validate the use of the Taguchi Method for robust MEMS sensor design and highlight its potential for industrial heating, ventilation, and air conditioning (HVAC) applications.