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April 7, 2024

Advanced strategies for high activation in ion implanted 4H-SiC by laser annealing

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CCCristiano CalabrettaAPA. PecoraMAMarta Agati

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Calabretta et al. (2024) studied this question.

synapsesocial.com/papers/68e701f4b6db64358767bf8dhttps://doi.org/10.1109/eurosime60745.2024.10491439
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