High-performance GeSi/Ge multi-quantum well photodetector on a Ge-buffered Si substrate

This work demonstrates a high-performance photodetector with a 4-cycle Ge 0.86 Si 0.14 /Ge multi-quantum well (MQW) structure grown by reduced pressure chemical vapor deposition techniques on a Ge-buffered Si (100) substrate. At −1 V bias, the dark current density of the fabricated PIN mesa devices is as low as 3 mA/cm 2 , and the optical responsivities are 0.51 and 0.17 A/W at 1310 and 1550 nm, respectively, corresponding to the cutoff wavelength of 1620 nm. At the same time, the device has good high-power performance and continuous repeatable light response. On the other hand, the temperature coefficient of resistance (TCR) of the device is as high as −5.18%/K, surpassing all commercial thermal detectors. These results indicate that the CMOS-compatible and low-cost Ge 0.86 Si 0.14 /Ge multilayer structure is promising for short-wave infrared and uncooled infrared imaging.