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November 13, 2008The Journal of Physical Chemistry C

Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

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Authors

DGDavid N. GoldsteinUniversity of Colorado BoulderJMJarod A. McCormickUniversity of Colorado BoulderSGSteven M. GeorgePohang University of Science and Technology

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Goldstein et al. (2008) studied this question.

synapsesocial.com/papers/69d7c83805ee2ba81dbededahttps://doi.org/10.1021/jp804296a
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