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May 1, 1993IEEE Transactions on Electron DevicesOpen Access

Mechanical-thermal noise in micromachined acoustic and vibration sensors

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TGT. B. GabrielsonPennsylvania State University

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T. B. Gabrielson (1993) studied this question.

synapsesocial.com/papers/6a032d72a7089d6435653a1chttps://doi.org/10.1109/16.210197
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