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A bibliography of more than 550 papers in the field of metal-insulator-semiconductor theory and technology provides a catalog of the published work so that investigators can more easily relate their work to that reported by others. In most of the papers, the insulator layer discussed is SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> or silicon nitride, and the semiconductor is silicon. The information has been arranged according to the following major classifications: MOS transistor behavior physics preparation of oxide layers techniques for evaluating insulator layers related information from the field of glass technology device fabrication technology radiation effects alternative materials.
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E. S. Schlegel (1967) studied this question.
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