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The fabrication, spectroscopic properties, and laser performance of Nd/sup 3+/-doped Ta/sub 2/O/sub 5/ channel waveguide lasers are described. Lasing is obtained at both 1.066 and 1.375 /spl mu/m with threshold pump powers as low as 2.7 mW. The rib waveguides are reactive-ion-etched into Nd:Ta/sub 2/O/sub 5/ layers formed by reactive magnetron sputtering. These high-index low-loss rare-earth-doped waveguides are fabricated on silicon substrates and offer the potential for integration with photonic crystal structures for compact optical circuits.
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Ünal et al. (2005) studied this question.
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