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October 2, 1989Applied Physics Letters

Plan-view transmission electron diffraction measurement of roughness at buried Si/SiO2 interfaces

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Authors

JGJ. M. GibsonFlorida A&M University - Florida State University College of EngineeringMLMary LanzerottiVirginia TechVEVeit ElserCornell University

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Gibson et al. (1989) studied this question.

synapsesocial.com/papers/6a700c82e5469ee92be0d374https://doi.org/10.1063/1.102280
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