Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
August 1, 1988Journal of Applied Physics

Laser-induced fluorescence spectroscopy for the determination of the absolute density and spatial distribution of Si atoms in a SiH4-He-Ar glow discharge

View Full Paper
Ask AI
Bookmark
Share

Authors

YTY. TakuboThe University of TokyoYTY. TakasugiGoddard Space Flight CenterMYManabu YamamotoTokuyama (Japan)

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Takubo et al. (1988) studied this question.

synapsesocial.com/papers/6a70969af44fa9f079de4160https://doi.org/10.1063/1.342476
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Spatial concentrations of silicon atoms by laser-induced fluorescence in a silane glow discharge1984 · 77 citations
  2. 2Comparisons between a gas-phase model of silane chemical vapor deposition and laser-diagnostic measurements1986 · 78 citations