Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
April 1, 1988Journal of Applied Physics

Monte Carlo simulation of ion transport through rf glow-discharge sheaths

View Full Paper
Ask AI
Bookmark
Share

Authors

BTBrian E. ThompsonN5 Sensors (United States)HSHerbert H. SawinMassachusetts Institute of TechnologyDFDonald A. FisherAlberta Innovates

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

Thompson et al. (1988) studied this question.

synapsesocial.com/papers/6a70973e26a7f98052dd11fchttps://doi.org/10.1063/1.341062
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Motion of Gaseous Ions in Strong Electric Fields1953 · 619 citations
  2. 2Relation between the RF discharge parameters and plasma etch rates, selectivity, and anisotropy1984 · 61 citations
  3. 3A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System1970 · 124 citations
  4. 4Monte-Carlo investigations of the motion of gaseous ions in electrostatic fields1973 · 113 citations
  5. 5Calculation of Ion Bombarding Energy and Its Distribution in rf Sputtering1968 · 112 citations