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December 1, 1980Journal of Applied Physics

Automatic x-ray diffraction measurement of the lattice curvature of substrate wafers for the determination of linear strain patterns

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ASArmin SegmüllerIBM Research - Thomas J. Watson Research CenterJAJ. AngileloIBM Research - Thomas J. Watson Research CenterSPS. J. La PlacaIBM Research - Thomas J. Watson Research Center

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Segmüller et al. (1980) studied this question.

synapsesocial.com/papers/6a71a87735aa2c282ce2dce2https://doi.org/10.1063/1.327606
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  5. 5X-Ray Determination of Stresses in Thin Films and Substrates by Automatic Bragg Angle Control1973 · 74 citations