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May 1, 1982Japanese Journal of Applied Physics

Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3

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Authors

KTKikuo TominagaKeio UniversitySISatoshi IwamuraTokushima UniversityYSYoshihiro ShintaniTokushima University

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Tominaga et al. (1982) studied this question.

synapsesocial.com/papers/6a756fdef5fc39414403639fhttps://doi.org/10.1143/jjap.21.688
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Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Origin and Effects of Negative Ions in the Sputtering of Intermetallic Compounds1977 · 44 citations
  2. 2Significance of negative ion formation in sputtering and SIMS analysis1978 · 111 citations
  3. 3Secondary Electron Ejection from Contaminated Metal Surface by He and Ar Atoms1974 · 24 citations
  4. 4High-Energy Neutral Atoms in the Sputtering of ZnO1981 · 66 citations
  5. 5Consistent Theory of Sputtering of Solid Targets by Ion Bombardment Using Power Potential Law1973 · 64 citations