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The importance of force sensing technologies was recognized in the 1970s. Since then, multidimensional microelectromechanical systems (MEMS)/micro force/moment (F/M) sensors have permeated a wide variety of products. A multidimensional MEMS/micro-F/M sensor can measure the tangential force terms along x-, y-, and z-axis (Fx, Fyand Fz) as well as the moments terms about x-, y-, and z-axis (Mx, Myand Mz) simultaneously with micro-Newton and nano-Newtonmeter resolution. This paper presents an overview of MEMS/micro-F/M sensors. This field is critical to many biomedical applications, materials science, industrial automation, dimension measurements in microcomponents, and nanomanufacturing applications, and has attracted great activity in the past 15-25 years. The evaluation of different F/M sensing principles, recent advances in various designs, and their significance and limitations are analyzed through specific examples. Furthermore, current challenges and new area for future applications of micro-F/M sensing technology have been identified.
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Liang et al. (2014) studied this question.
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