Optical and Dielectric Characterization of Atomic Layer Deposited Nb2O5 Thin Films

Nb 2 O 5 films were grown by atomic layer deposition using (tert-butylimido)tris(diethylamido)niobium as the niobium source and ozone as the oxygen source. The effects of deposition and post-deposition annealing conditions, physical thickness as well as the phase composition on the dielectric properties of Nb 2 O 5 thin films have been investigated. In addition, the optical properties of the films have been evaluated. It was found that by tuning the deposition parameters and post deposition treatments it was possible to obtain high k-values up to 120 with reasonably low leakage current.