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July 15, 1978Applied Physics Letters

Arsenic diffusion in silicon melted by high-power nanosecond laser pulsing

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Authors

PBP. BaeriUniversity of CataniaSCS. U. CampisanoUniversity of CataniaGFG. FótiUniversity of Messina

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Baeri et al. (1978) studied this question.

synapsesocial.com/papers/6a7e52aa760ccf6bd099100fhttps://doi.org/10.1063/1.90283
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Also Consider

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  1. 1Structural, Optical, and Electrical Properties of Amorphous Silicon Films1970 · 515 citations
  2. 2Diffusion of Donor and Acceptor Elements in Silicon1956 · 338 citations