What question did this study set out to answer?

To synthesize lead titanate (PbTiO3) thin films using photoenhanced chemical vapor deposition and evaluate the effects of ultraviolet light and nitrogen dioxide on growth and properties.

September 1, 1991Japanese Journal of Applied PhysicsOpen Access

Growth and Properties of PbTiO3 Thin Films by Photoenhanced Chemical Vapor Deposition

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Authors

TKTakuma KatayamaBoehringer Ingelheim (Philippines)MFM. FujimotoNihon University MSMasaru ShimizuNagoya University

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Implication

Experimental study demonstrates photoenhanced chemical vapor deposition of lead titanate films on sapphire, indicating nitrogen dioxide photodissociation lowers growth temperature.

Key Points

To synthesize lead titanate (PbTiO3) thin films using photoenhanced chemical vapor deposition and evaluate the effects of ultraviolet light and nitrogen dioxide on growth and properties.
Deposited PbTiO3 thin films on sapphire substrates using tetraethyl lead, titanium tetraisopropoxide, and nitrogen dioxide precursors.
Applied ultraviolet light irradiation during growth runs to drive photoenhanced deposition across varying substrate temperatures.
Obtained perovskite-structured PbTiO3 films on sapphire substrates at temperatures exceeding 530°C.
Demonstrated that UV photodissociation of NO2 significantly lowered the deposition temperature while modifying crystal quality, dielectric properties, and step coverage.

Cite This Study

Katayama et al. (1991) studied this question.

synapsesocial.com/papers/6a83c56053408ed95e4d84aa https://doi.org/10.1143/jjap.30.2189

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Implication

Experimental study demonstrates photoenhanced chemical vapor deposition of lead titanate films on sapphire, indicating nitrogen dioxide photodissociation lowers growth temperature.

Growth and Properties of PbTiO3 Thin Films by Photoenhanced Chemical Vapor Deposition

Discussion

Member takes

Implication

Key Points

Cite This Study

Growth and Properties of PbTiO3 Thin Films by Photoenhanced Chemical Vapor Deposition

Discussion

Member takes

Implication

Key Points

Cite This Study

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