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February 15, 1980Applied Physics Letters

Chemical vapor deposition of ZnO epitaxial films on sapphire

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Authors

STShiban TikuSkyworks Solutions (United States)CLC. K. LauKLK.M. LakinUniversity of Southern California

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Tiku et al. (1980) studied this question.

synapsesocial.com/papers/6a84818c8bb79d42a483db27https://doi.org/10.1063/1.91477
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Also Consider

Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Heteroepitaxial Semiconductors for Electronic Devices1979 · 84 citations
  2. 2EPITAXIAL ZnO ON SAPPHIRE1970 · 89 citations
  3. 3Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on Sapphire1978 · 53 citations
  4. 4Investigation of the surface acoustic wave properties of heteroepitaxial ZnO layers on Al2O31972 · 23 citations