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December 1, 1990Japanese Journal of Applied PhysicsOpen Access

Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation

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TSTakao ShiokawaRIKENKIKoji IshibashiCanon (Japan)PKPil Hyon KimFrontier Hospital

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Shiokawa et al. (1990) studied this question.

synapsesocial.com/papers/6a8522ee22ea7ab258b2e65ehttps://doi.org/10.1143/jjap.29.2864
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