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June 1, 1976IEEE Transactions on Electron Devices

Transmission electron microscopy of cross sections of large scale integrated circuits

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Authors

TST. T. ShengNational Taichung University of Science and TechnologyCCChyh-Yih ChangMicrochip Technology (United States)

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Cite This Study

Sheng et al. (1976) studied this question.

synapsesocial.com/papers/6a853c3ce1eabc68e2929224https://doi.org/10.1109/t-ed.1976.18447
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