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January 1, 1970Radiation Effects

Damage produced by ion mplantation in silicon

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Authors

SDSimon DavidsonUniversity of ManchesterGBG. R. BookerSiemens (Germany)

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Davidson et al. (1970) studied this question.

synapsesocial.com/papers/6a853d7af2bb7ee68cf23fdahttps://doi.org/10.1080/00337577008235043
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Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1ION IMPLANTATION DAMAGE OF SILICON AS OBSERVED BY OPTICAL REFLECTION SPECTROSCOPY IN THE 1 TO 6 eV REGION1969 · 60 citations
  2. 2Implantation profiles of 32P channeled into silicon crystals1968 · 101 citations
  3. 3The distribution of condensed defect structures formed in annealed boron-implanted silicon1969 · 35 citations
  4. 4Observation of ion bombardment damage in silicon1968 · 222 citations
  5. 5ION IMPLANTATION OF SILICON: I. ATOM LOCATION AND LATTICE DISORDER BY MEANS OF 1.0-MeV HELIUM ION SCATTERING1967 · 274 citations