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April 1, 1992IEEE Transactions on Plasma Science

The space-time-averaging procedure and modeling of the RF discharge II. Model of collisional low-pressure RF discharge

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Authors

IKIgor KaganovichPrinceton Plasma Physics LaboratoryLTL. D. TsendinPeter the Great St. Petersburg Polytechnic University

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Kaganovich et al. (1992) studied this question.

synapsesocial.com/papers/6a8931d09f05dd9930a2c500https://doi.org/10.1109/27.134026
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