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September 1, 1987IEEE Transactions on Electron Devices

Ultra-thin Ta2O5dielectric film for high-speed bipolar memories

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Authors

YNYasushiro NishiokaHiroshima UniversityNHN. HommaHosei UniversityHSH. ShinrikiASM International

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Cite This Study

Nishioka et al. (1987) studied this question.

synapsesocial.com/papers/6a896a0f851416c68bf7cbachttps://doi.org/10.1109/t-ed.1987.23181
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  5. 5Electrical properties of amorphous tantalum pentoxide thin films on silicon1983 · 75 citations