We report on growth and deposition process optimization of laser ablation-deposited Pb(Zr0.53Ti0.47)O3 thin films for application in piezoelectric microdevices. Films were grown on three different substrates: (100) cut LaAlO3 single crystals, Pt/Ti/SiO2/Si, and Pt/Ti/Si3+xN4/Si. On all three substrates, a deposition temperature of 620°C yielded perovskite films with good ferroelectric hysteresis properties. La0.5Sr0.5CoO3 bottom and top electrodes were used for all films. PZT films on Pt/Ti/SiO2/Si showed a variation of texture with film thickness. Thin membranes of PZT on Si3+xN4 were also fabricated.
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Nickles et al. (1995) studied this question.
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