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September 28, 1970Physical Review Letters

Experimental-Condition Dependence of Phosphorus Diffusivity in Silicon

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RGR. N. Ghostagore

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R. N. Ghostagore (1970) studied this question.

synapsesocial.com/papers/6a8af87fc716e89f35decc54https://doi.org/10.1103/physrevlett.25.856
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Also Consider

Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Stress at the Si—SiO2interface and its relationship to interface states1968 · 34 citations
  2. 2The Diffusion of Phosphorus in Silicon1962 · 61 citations
  3. 3Oxidation, defects and vacancy diffusion in silicon1969 · 130 citations
  4. 4Diffusion of Phosphorus into Silicon1962 · 51 citations