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June 1, 1965Journal of Applied Physics

Refractive Index of SiO2 Films Grown on Silicon

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Authors

WPW. A. PliskinIBM (United States)RER. P. EschRite-Solutions (United States)

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Pliskin et al. (1965) studied this question.

synapsesocial.com/papers/6a8c2097c12eaf65c8b232e8https://doi.org/10.1063/1.1714393
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Also Consider

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  1. 1Films Built by Depositing Successive Monomolecular Layers on a Solid Surface1935 · 1,761 citations
  2. 2Nondestructive Determination of Thickness and Refractive Index of Transparent Films1964 · 112 citations
  3. 3Index of refraction of fused-quartz glass for ultraviolet, visible, and infrared wavelengths1954 · 50 citations
  4. 4Evidence for Oxidation Growth at the Oxide-Silicon Interface from Controlled Etch Studies1964 · 85 citations