Infrared spectroscopy of hydrides on the 6H-SiC surface

Hydrides on the 6H-SiC(0001̄) and (0001) surfaces before and after hydrogen annealing were investigated by infrared attenuated total reflection spectroscopy. The absorption bands of CH2 and CH3 were observed from the 6H-SiC(0001̄) and (0001) surfaces before hydrogen annealing. After hydrogen annealing, a sharp C–H stretching vibration attributable to a monohydride appeared on the 6H-SiC(0001̄) surface, in contrast to a sharp Si–H stretching vibration which can be observed on the 6H-SiC(0001) surface.