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February 1, 2000Journal of Applied Physics

Creation of high resistivity GaN by implantation of Ti, O, Fe, or Cr

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Authors

XCX. A. CaoZaozhuang University
S. J. Pearton
S. J. PeartonUniversity of Stuttgart
GDG. DangDEVCOM Army Research Laboratory

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Cao et al. (2000) studied this question.

synapsesocial.com/papers/6a90371e6bfd95d7bd4dd000https://doi.org/10.1063/1.371984
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