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July 1, 2004Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics

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Authors

PBP. BayiatiNational Centre of Scientific Research "Demokritos"ATAngeliki TserepiNational Centre of Scientific Research "Demokritos"ΕGΕvangelos GogolidesNational Centre of Scientific Research "Demokritos"

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Bayiati et al. (2004) studied this question.

synapsesocial.com/papers/6a93b0eb87f8000eec56af11https://doi.org/10.1116/1.1764815
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