In situ investigation of growth modes during plasma-assisted molecular beam epitaxy of (0001) GaN

Real-time analysis of the growth modes during homoepitaxial (0001) GaN growth by plasma-assisted molecular beam epitaxy was performed using reflection high energy electron diffraction. A growth mode map was established as a function of Ga∕N flux ratio and growth temperature, exhibiting distinct transitions between three-dimensional (3D), layer-by-layer, and step-flow growth modes. The layer-by-layer to step-flow growth transition under Ga-rich growth was surfactant mediated and related to a Ga adlayer coverage of one monolayer. Under N-rich conditions the transition from 3D to layer-by-layer growth was predominantly thermally activated, facilitating two-dimensional growth at temperatures of thermal decomposition.