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A procedure for fitting of Monte Carlo calculated impact ionization coefficient to experimental data has been proposed. This procedure has been applied for optimization and sensitivity analysis of fitting parameters of impact ionization model for electrons in Si. Strong correlation between threshold energy and preexponential factor of the impact ionization model and redundancy of power exponent have been found. A wide range of data on impact ionization coefficient can be fitted by adjusting the parameters of the microscopic impact ionization model.
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Ershov et al. (1994) studied this question.
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